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TSMC Repurposing Old Fabs to Bring EUV Pellicle Production In-House
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Especially in the recent past, it has been reported more frequently that TSMC is dismantling older production lines in order to create space for new production lines.
TSMC Repurposing Old Fabs to Bring EUV Pellicle Production In-House
TSMC is repurposing its old, wound-down, 8-inch Fab 3 in Hsinchu Science Park to produce extreme ultraviolet pellicles, bringing this production in-house. An EUV pellicle is a thin, highly transparent membrane stretched above a photomask to prevent particles from contacting the mask during EUV exposure. It is designed to withstand intense EUV radiation and thermal stress while minimizing optical absorption and wavefront distortion. Producing pel…
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