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Nonlinear Stiffness Softening Unlocks High-Performance MEMS Sensing in Compact Devices
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Nonlinear Stiffness Softening Unlocks High-Performance MEMS Sensing in Compact Devices
Achieving both high sensitivity and a wide dynamic range remains a central challenge in microelectromechanical accelerometers. This study presents a newly engineered nonlinear stiffness-softening mechanism that enables micro-electro-mechanical systems (MEMS) accelerometers to operate with dramatically reduced bias force and displacement while maintaining exceptional sensitivity. By integrating an inclined beam that buckles under a preset load an…
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