US EditionHigh-NA EUV Tools Cost Nearly $400 Million Yet Deliver Big Savings on Complex Layers
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High-NA EUV Tools Cost Nearly $400 Million Yet Deliver Big Savings on Complex Layers
High‑NA EUV lithography comes with a crazy $380 million price tag, but it can actually cut overall production costs in the right situations. At the SPIE Advanced Lithography and Patterning conference in February 2025, IBM researchers in Veldhoven revealed that one high‑NA exposure runs about 2.5x the cost of a standard low‑NA shot. That seems steep, yet High‑NA's real strength shows up when it replaces complicated multi‑patterning processes. Sem…
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