US EditionBackside Power Delivery Nears Production
Summary by Semiconductor Engineering
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Backside Power Delivery Nears Production
Backside power delivery is being called a game changer — a breakthrough technology and the next great enabler in CMOS scaling. It promises significant PPA advances, including faster switching, lower voltage droop, and reduced power supply noise. And it is poised to deliver these benefits below the 2nm node, despite a substantial disruption in front-end processes from lithography pattern distortion caused by extreme wafer thinning, wafer bonding,…
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