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SK Hynix Introduces Industry's First Commercial High NA EUV

  • SK Hynix has assembled the industry's first High NA EUV lithography system for mass production at the M16 fabrication plant in Icheon, South Korea.
  • The TWINSCAN EXE:5200B can print transistors 1.7 times smaller and achieve transistor densities 2.9 times higher than existing EUV systems.
  • This technology is essential for advancing the semiconductor industry and enhancing leadership in the artificial intelligence memory market.
  • The High NA EUV lithography system is now installed at SK Hynix's main production base in Icheon, South Korea.
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The Conway Daily SunThe Conway Daily Sun
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SK hynix Introduces Industry's First Commercial High NA EUV

Brings ASML's EXE:5200B, critical system for next-generation chips, to M16 fab

For two decades, the European ASML has travelled a titanic path that took it from the 65 nanometers back in 2003 to the equipment capable of printing chips below 3 nm in 2023. Now, the company has published key data in terms of technology, R & D and costs, where in that journey more than 40 billion dollars were left and twenty years of research and improvement were needed. Faced with that evolution, the Chinese semiconductor industry is still st…

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PR Newswire broke the news in United States on Tuesday, September 2, 2025.
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