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Onto Innovation Completes $720 Million Investment in Rigaku Holdings

Summary by Citybiz
Onto Innovation Inc. (NYSE: ONTO) has completed its previously announced acquisition of a 27% minority stake in Rigaku Holdings Corporation for approximately $720 million, deepening a strategic partnership focused on advanced X-ray technologies for semiconductor manufacturing process control. The Wilmington, Massachusetts-based semiconductor process control company acquired the stake from Atom Investment, L.P., an affiliate of Carlyle, for 113,0…
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citybiz broke the news on Monday, August 10, 2026.
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