US EditionHigh Precision Microstructures with Vacuum Lithography
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The results of an investigation by the Microfluidics Cluster group of the UPV/EHU highlight the versatility of the vacuum lithography technique to create stable ionogel microstructures, providing an accessible method for the development of multifunctional and customizable devices based on them. Multicomponent manufacturing with micrometric precision The technique developed allows creating, on a flat substrate, microstructures with dimensions sma…
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