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Entegris Achieves Further Success in Defending Its CMP Slurry Patent Portfolio
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Entegris Achieves Further Success in Defending Its CMP Slurry Patent Portfolio
BILLERICA, Mass.--(BUSINESS WIRE)--Entegris, Inc. (Nasdaq: ENTG), a leading supplier of critical advanced materials and process solutions for the semiconductor and other high-technology industries, today announced recent decisions in Taiwan and China upholding patents covering key Entegris colloidal silica slurry technology used in chemical mechanical planarization (CMP) applications. The decisions further reinforce the strength of Entegris’s gl…
·Crystal River, United States
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