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China Turns to Older Chipmaking Technology to Make 3nm Chips

The Chinese Academy of Sciences says early integration of stacked nanosheet GAA transistors using DUV tools could support sub-3nm chip development.

The approach could give China another route toward advanced chipmaking despite restrictions on access to ASML’s EUV machines.

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Due to the ban imposed by America, after getting the latest EU equipment, China started manufacturing chips smaller than 3-nm using old technology. Chinese researchers have achieved success in the same way using the old lithography technique. Due to the current US export control regulations, the Dutch company Asmelle, which wants to make chips smaller than 7-nm, wants to sell state-of-the-art EU machines to China.

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South China Morning Post broke the news in Hong Kong, Hong Kong on Saturday, September 19, 2026.
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