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China starts production of home-grown immersion DUV chipmaking tools: Report

The reported output is limited to about five machines this year and 20 in 2027, underscoring China’s push to reduce reliance on ASML.

  • On Monday, The Information reported that China began manufacturing domestically developed immersion DUV lithography machines, a key chipmaking tool long dominated by Dutch supplier ASML, causing ASML shares to fall 6.5% in Amsterdam.
  • Export controls from the Netherlands and Japan have curtailed shipments of NXT systems under U.S. pressure, eroding China's relationship with ASML. China's share of ASML net system sales dropped from 19% in Q1 to 14% in Q2.
  • Production of immersion DUV machines will be limited initially, with about five units expected this year and roughly 20 in 2027. The domestic system still lags in performance and reliability compared to ASML machines, requiring further testing.
  • Shares of Applied Materials and Lam Research each declined around 4% on Monday, reflecting broader market concern. China identified lithography technology as a strategic priority as early as 2002, signaling long-term commitment.
  • While China is developing domestic EUV lithography machines, the technology remains at the prototype stage. The MATCH Act could force the Netherlands and Japan to align DUV restrictions with U.S. rules within 150 days.
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(Seoul = Yonhap News) Reporter Joo Jong-guk = The company that has garnered attention for starting the manufacture of immersion deep ultraviolet (DUV) lithography equipment in China is the Chinese state-owned enterprise 'Shanghai Aishengna...

·Seoul, Korea (the Republic of)
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This is an important step in the strategy to reduce Beijing ' s dependence on Western technologies and the development of the semiconductor industry.

·Kyiv, Ukraine
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techpowerup.com broke the news on Monday, July 27, 2026.
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