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China starts production of home-grown immersion DUV chipmaking tools: Report

The limited rollout could give Chinese chipmakers a domestic alternative as export controls restrict access to advanced foreign tools.

  • On Monday, The Information reported that China began manufacturing domestically developed immersion DUV lithography machines, a key chipmaking tool long dominated by Dutch supplier ASML, causing ASML shares to fall 6.5% in Amsterdam.
  • Export controls from the Netherlands and Japan have curtailed shipments of NXT systems under U.S. pressure, eroding China's relationship with ASML. China's share of ASML net system sales dropped from 19% in Q1 to 14% in Q2.
  • Production of immersion DUV machines will be limited initially, with about five units expected this year and roughly 20 in 2027. The domestic system still lags in performance and reliability compared to ASML machines, requiring further testing.
  • Shares of Applied Materials and Lam Research each declined around 4% on Monday, reflecting broader market concern. China identified lithography technology as a strategic priority as early as 2002, signaling long-term commitment.
  • While China is developing domestic EUV lithography machines, the technology remains at the prototype stage. The MATCH Act could force the Netherlands and Japan to align DUV restrictions with U.S. rules within 150 days.
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40 Articles

Lean Left

China is going to build its own chip manufacturing machines. Will that put an end to the unique position of the Dutch company ASML?

ReutersReuters
+2 Reposted by 2 other sources
Center

EXCLUSIVE: China starts production of home-grown immersion DUV chipmaking tools

This marks a key step forward in Beijing's drive to ‌reduce its reliance on foreign technologies.

·London, United Kingdom
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Lean Right

Semiconductor stocks plunge on report by China's DUV. US semiconductor stocks, including ASML and SanDisk (-11.02%), plummeted following reports that China has begun producing lithography equipment. On the 28th, Samsung Electronics (-8.86%) and SK Hynix (-10.30%) also opened the trading session with sharp declines. Overnight...

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techpowerup.com broke the news on Monday, July 27, 2026.
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