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China Begins Making Homegrown DUV Chipmaking Tools: The Information

The tools could give Chinese chipmakers a domestic alternative as production stays limited and the systems still lag ASML on performance and reliability.

  • On Monday, The Information reported that China began manufacturing domestically developed immersion DUV lithography machines, a key chipmaking tool long dominated by Dutch supplier ASML, causing ASML shares to fall 6.5% in Amsterdam.
  • Export controls from the Netherlands and Japan have curtailed shipments of NXT systems under U.S. pressure, eroding China's relationship with ASML. China's share of ASML net system sales dropped from 19% in Q1 to 14% in Q2.
  • Production of immersion DUV machines will be limited initially, with about five units expected this year and roughly 20 in 2027. The domestic system still lags in performance and reliability compared to ASML machines, requiring further testing.
  • Shares of Applied Materials and Lam Research each declined around 4% on Monday, reflecting broader market concern. China identified lithography technology as a strategic priority as early as 2002, signaling long-term commitment.
  • While China is developing domestic EUV lithography machines, the technology remains at the prototype stage. The MATCH Act could force the Netherlands and Japan to align DUV restrictions with U.S. rules within 150 days.
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China has started large-scale production of advanced chip manufacturing equipment, the same equipment that made ASML so successful. The reports...

·Amsterdam, Netherlands (Kingdom of the)
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techpowerup.com broke the news on Monday, July 27, 2026.
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