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LLNL, Stanford Researchers Report 3D Nanofabrication Approach for TPL Wafer-Scale Manufacturing
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LLNL, Stanford Researchers Report 3D Nanofabrication Approach for TPL Wafer-Scale Manufacturing
Researchers at Lawrence Livermore National Laboratory and Stanford University announced in December they have demonstrated a new 3D nanofabrication approach that they say transforms two-photon lithography (TPL) from a slow, lab-scale technique into a wafer-scale manufacturing tool without sacrificing submicron precision. Published in Nature, the team’s TPL platform uses large arrays of metalenses — engineered, ultrathin […] The post LLNL, Stanfo…
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