GaN-Based E-Beam Inspection and Metrology Co-Developed by Startup Photo Electron Soul Inc. and Nagoya University Will Be Evaluated by Kioxia

GaN-based e-Beam Inspection and Metrology Co-developed by Startup Photo electron Soul Inc. and Nagoya University Will be Evaluated by Kioxia, a Leading Flash Memory Producer

NAGOYA, Japan--(BUSINESS WIRE)--Sep 1, 2025-

Nagoya University startup brings GaN-based electron beam breakthrough to KIOXIA’s semiconductor lines

A new semiconductor inspection and metrology platform, developed through a collaboration between Nagoya University and its startup, Photoelectron Soul Inc. (PeS), is set to begin validation in KIOXIA’s advanced production lines This technology, built around a GaN-based electron beam (e-beam) system, shows the potential for a breakthrough in overcoming long-standing barriers in semiconductor manufacturing inspection. In late September 2025, KIOXI…

GaN-based e-Beam Inspection and Metrology Co-developed by Startup Photo electron Soul Inc. and Nagoya University Will be Evaluated by Kioxia

It was announced today that GaN (Gallium Nitride)-based e-Beam inspection and metrology for advanced semiconductor manufacturing, jointly developed by Nagoya University startup Photo electron Soul Inc. (PeS; CEO: Takayuki Suzuki) and the Nagoya University Amano-Honda Laboratory, will be evaluated by Kioxia Iwate Corporation (President and CEO: Koichiro Shibayama) in late September. During the critical field test, Kioxia Iwate will evaluate and v…