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Entegris and JSR Corporation/Inpria Corporation Announce Non-Exclusive Cross-Licensing to EUV Lithography

Summary by The Norfolk Daily News
Entegris, Inc. (Nasdaq: ENTG), a global leader in advanced materials and purity solutions for the semiconductor

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Entegris and JSR Corporation/Inpria Corporation Announce Non-Exclusive Cross-Licensing to EUV Lithography

Entegris, Inc. (Nasdaq: ENTG), a global leader in advanced materials and purity solutions for the semiconductor

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stocktitan.netstocktitan.net

Entegris and JSR cross-license EUV resist patents for AI-era chips

Non-exclusive deal covers metal oxide resist patents, ends an IPR challenge and backs photoresist and filtration work for EUV chips in the AI era.

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stocktitan.net broke the news on Tuesday, May 26, 2026.
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