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Langdao Silex Shows an EUV Light Source Prototype, Says Mass Production Is Three to Five Years Away

Summary by Pandaily
Langdao Silex, a Shanghai startup developing light sources for extreme ultraviolet lithography, showed a prototype EUV light source system for the first time at the 2026 China International Industry Fair, which is running at the National Exhibition and Convention Center in Shanghai. Staff at the booth said mass production is still three to five years away. The light source is one of the core components of an EUV scanner, the tool used to pattern…

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In China, an innovative EUV radiation source prototype with 90% localization of components was presented, which is the key to creating its own advanced lithography systems.

·Kyiv, Ukraine
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Chinese company Langdao Silex has unveiled its first working prototype of an EUV light source for manufacturing semiconductors with 90% domestic components, bypassing US trade restrictions.

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South China Morning Post broke the news in Hong Kong, Hong Kong on Thursday, October 15, 2026.
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