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Befar Group Makes Breakthrough in High-Purity Hydrogen Fluoride Production
The company completed a 50-ton-per-year filling line and secured a license as it begins supplying major customers at home and abroad.
Befar Group achieved a technological breakthrough in Shandong Province, producing high-purity hydrogen fluoride at the 6N grade . This milestone fills a significant production gap for the essential semiconductor manufacturing material.
High-Purity hydrogen fluoride, often referred to as the "chemical scalpel," is essential for semiconductor chip etching and cleaning at advanced process nodes of 28 nanometers and below. For years, domestic supply relied heavily on imports.
Having obtained a cylinder filling license from the Shandong Special Equipment Inspection Institute, the company completed a 50-ton-per-year high-purity hydrogen fluoride cylinder filling line. Befar Group maintains key metal-ion impurity levels below 1 part per billion.
By increasing locally supplied capacity, Befar Group aims to ensure the secure and stable operation of the semiconductor industry chain. This achievement marks a complete closed loop from laboratory research and development to industrial-scale production.
Forrester forecasts that average technology sovereignty scores across 14 nations will rise only minimally by 2030, with China and the US maintaining their lead. Befar Group plans to expand its high-end specialty gas product portfolio and develop electronic-grade hydrogen compounds.