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ASML to work with major chipmakers to use latest tools for larger chips

  • On Tuesday, ASML announced that TSMC and Samsung Electronics committed to using its High NA EUV lithography machines, joining an industry initiative to adopt next-generation 12-inch photomask technology.
  • Current 6-inch photomask formats restrict chip size, so moving to 12-inch masks supports the complex transistor architectures required for advanced AI applications. This upgrade addresses a key limitation in High NA EUV tools.
  • ASML Chief Technology Officer Marco Pieters said system "productivity... will go up by 40%." These High NA EUV tools, costing around $400 million, enable printing finer, more intricate circuit patterns.
  • Samsung plans to introduce High NA EUV into DRAM production by 2028, while TSMC targets 2030 for high-volume manufacturing. Hynix is evaluating participation in the 12-inch mask consortium for DRAM mass production.
  • Barclays noted these announcements provide "more visibility on adoption," calling the news "a positive." ASML plans to add about 30% capacity for EUV production in 2027 to meet strong market demand.
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The Dutch manufacturer of ASML semiconductor equipment and Taiwanese TSMC have closed a strategic partnership to develop larger photomasks for extreme ultraviolet lithography (EUV). Exclusive material for subscribers. To have full access, access the material link and register.

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Business Wire broke the news in Crystal River, United States on Monday, September 7, 2026.
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